Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067887 | Apparatus for manufacturing pellicle | Mun Ja Kim, Ji-Beom Yoo, Soo-Young Kim, Hwan Chul Jeon, Seul Gi Kim +2 more | 2021-07-20 |
| 11061322 | Systems and methods using mask pattern measurements performed with compensated light signals | Ji Hoon Na, Dong Gun Lee | 2021-07-13 |