Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061322 | Systems and methods using mask pattern measurements performed with compensated light signals | Dong Gun Lee, Hee-Bom Kim | 2021-07-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061322 | Systems and methods using mask pattern measurements performed with compensated light signals | Dong Gun Lee, Hee-Bom Kim | 2021-07-13 |