Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073757 | Methods of manufacturing pellicle assembly and photomask assembly | Seulgi KIM, Kibong Nam, Jinho Yeo, Jibeom Yoo | 2021-07-27 |
| 11067887 | Apparatus for manufacturing pellicle | Ji-Beom Yoo, Soo-Young Kim, Hee-Bom Kim, Hwan Chul Jeon, Seul Gi Kim +2 more | 2021-07-20 |
| 10969702 | Extreme ultraviolet lithography apparatus | Eokbong KIM | 2021-04-06 |