Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126094 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | Yasuo Aoki, Atsushi Hara, Takachika SHIMOYAMA, Katsuhiro SHIMATAKE, Iori NODA | 2021-09-21 |