Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187999 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2021-11-30 |
| 11126094 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | Atsushi Hara, Takachika SHIMOYAMA, Toru Kawaguchi, Katsuhiro SHIMATAKE, Iori NODA | 2021-09-21 |
| 10983438 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2021-04-20 |
| 10935894 | Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object | — | 2021-03-02 |