Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126094 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | Yasuo Aoki, Takachika SHIMOYAMA, Toru Kawaguchi, Katsuhiro SHIMATAKE, Iori NODA | 2021-09-21 |
| 11009799 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2021-05-18 |