Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127566 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | — | 2021-09-21 |
| 11037759 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Kakehi | 2021-06-15 |
| 11024485 | Multi-charged-particle-beam writing apparatus and beam evaluating method for the same | Eita FUJISAKI | 2021-06-01 |