Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037759 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2021-06-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037759 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2021-06-15 |