Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024485 | Multi-charged-particle-beam writing apparatus and beam evaluating method for the same | Osamu Iizuka | 2021-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024485 | Multi-charged-particle-beam writing apparatus and beam evaluating method for the same | Osamu Iizuka | 2021-06-01 |