Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199781 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Noriaki Nakayamada | 2021-12-14 |
| 10971331 | Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus | Shinji Sakamoto, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane | 2021-04-06 |