Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199781 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Kenichi Yasui | 2021-12-14 |
| 10950413 | Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage medium | — | 2021-03-16 |