Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971331 | Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus | Kenichi Yasui, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane | 2021-04-06 |