Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969400 | Semiconductor device, angle value correction circuit and method therefor | Yoshitaka Shibuya | 2021-04-06 |
| 10886103 | Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus | Kei Hasegawa, Yoshiaki Onimaru | 2021-01-05 |