Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886103 | Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus | Yoshiaki Onimaru, Hayato Kimura | 2021-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886103 | Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus | Yoshiaki Onimaru, Hayato Kimura | 2021-01-05 |