Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035878 | Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system | Paul Louis Maria Joseph VAN NEER, Daniele Piras, Marcus Johannes VAN DER LANS, Maarten Hubertus van Es, Hamed Sadeghian Marnani | 2021-06-15 |