Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067597 | Method of performing atomic force microscopy with an ultrasound transducer | Martinus Cornelius Johannes Maria van Riel, Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es | 2021-07-20 |
| 11035878 | Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system | Laurent Fillinger, Paul Louis Maria Joseph VAN NEER, Daniele Piras, Marcus Johannes VAN DER LANS, Maarten Hubertus van Es | 2021-06-15 |
| 11029329 | Method of and system for detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip | — | 2021-06-08 |
| 10976345 | Atomic force microscopy device, method and lithographic system | Abbas Mohtashami, Maarten Hubertus van Es | 2021-04-13 |
| 10948458 | Method of and system for performing detection on or characterization of a sample | Lukas Kramer, Maarten Hubertus van Es | 2021-03-16 |
| 10942200 | Heterodyne atomic force microscopy device, method and lithographic system | Abbas Mohtashami, Maarten Hubertus van Es | 2021-03-09 |
| 10935568 | Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device | Maarten Hubertus van Es | 2021-03-02 |
| 10908179 | Device and method for measuring and/or modifying surface features on a surface of a sample | — | 2021-02-02 |