Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054058 | Actively cooled vacuum isolation valve | David F. Broyer, David Neumeister, Bradly Raymond Lefevre | 2021-07-06 |
| 11024489 | Method and apparatus for deposition cleaning in a pumping line | Scott Benedict, Kevin W. Wenzel | 2021-06-01 |