Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107718 | Measurement system, substrate processing system, and device manufacturing method | Tomonori Dosho | 2021-08-31 |
| RE48429 | Substrate holding method, substrate holding apparatus, exposure apparatus and exposure method | — | 2021-02-09 |