Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024489 | Method and apparatus for deposition cleaning in a pumping line | Gordon Hill, Scott Benedict | 2021-06-01 |
| 10940635 | Method and apparatus for processing dielectric materials using microwave energy | Xing Chen, David Lam, Ilya Pokidov | 2021-03-09 |
| 10910798 | Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system | Atul Gupta, Colin August Sanford, Joshua Lamontagne | 2021-02-02 |