Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895805 | Pellicle manufacturing method and method for manufacturing photomask with pellicle | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima +1 more | 2021-01-19 |