Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163233 | Chemically amplified positive type photoresist composition and pattern forming method using the same | Masato Suzuki, Shunji Kawato, Tetsumasa Takaichi | 2021-11-02 |
| 11029599 | Chemically amplified positive photoresist composition and pattern forming method using same | Tetsumasa Takaichi, Shunji Kawato, Masato Suzuki, Tomohide KATAYAMA | 2021-06-08 |