Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003079 | Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound | Naoya Nosaka, Gouji Wakamatsu, Tsubasa Abe, Yuushi MATSUMURA, Yoshio Takimoto | 2021-05-11 |
| 10947748 | Reinforcement structure, equipment frame, and booth | Shigeki Fujiwara, Takaaki Tamura | 2021-03-16 |