Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170995 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shinya Ebata | 2021-11-09 |
| 11047048 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masahito Kitamura, Tetsuya Takahashi | 2021-06-29 |
| 10907253 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Shinya Ebata | 2021-02-02 |