Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075114 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2021-07-27 |
| 11047048 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroaki Hiramatsu, Tetsuya Takahashi | 2021-06-29 |