Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170995 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroaki Hiramatsu | 2021-11-09 |
| D925481 | Inlet liner for substrate processing apparatus | Toru Kagaya | 2021-07-20 |
| 10907253 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Hiroaki Hiramatsu | 2021-02-02 |