Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11179883 | Method for producing a 3D structure by means of laser lithography, and corresponding computer program product | Yann Tanguy | 2021-11-23 |
| 11143966 | Method and device for lithographically producing a target structure on a non-planar initial structure | Christian Koos, Tobias Hoose, Philipp-Immanuel Dietrich, Matthias Blaicher, Maria Laura Gödecke | 2021-10-12 |