Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143966 | Method and device for lithographically producing a target structure on a non-planar initial structure | Christian Koos, Tobias Hoose, Philipp-Immanuel Dietrich, Matthias Blaicher, Nicole Lindenmann | 2021-10-12 |