Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169446 | Method for producing an optical system and optical system | Philipp-Immanuel Dietrich, Christian Koos, Ingo Reuter, Yilin Xu | 2021-11-09 |
| 11143966 | Method and device for lithographically producing a target structure on a non-planar initial structure | Christian Koos, Tobias Hoose, Philipp-Immanuel Dietrich, Maria Laura Gödecke, Nicole Lindenmann | 2021-10-12 |