Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187953 | Laser processing apparatus, semiconductor device manufacturing method, and amorphous silicon crystallization method | Masashi Machida | 2021-11-30 |
| 11114300 | Laser annealing apparatus, inspection method of substrate with crystallized film, and manufacturing method of semiconductor device | Kenichi Ohmori, Ryosuke Sato, Masashi Machida | 2021-09-07 |