Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114300 | Laser annealing apparatus, inspection method of substrate with crystallized film, and manufacturing method of semiconductor device | Suk-Hwan Chung, Ryosuke Sato, Masashi Machida | 2021-09-07 |
| 10976487 | Manufacturing device and manufacturing method of optical fiber grating | Keiichiro Hata | 2021-04-13 |
| 10883860 | Optical fiber sensor | Koji Omichi, Shingo Matsushita, Kentaro Ichii | 2021-01-05 |