Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187953 | Laser processing apparatus, semiconductor device manufacturing method, and amorphous silicon crystallization method | Suk-Hwan Chung | 2021-11-30 |
| 11114300 | Laser annealing apparatus, inspection method of substrate with crystallized film, and manufacturing method of semiconductor device | Kenichi Ohmori, Suk-Hwan Chung, Ryosuke Sato | 2021-09-07 |
| 10943785 | Laser irradiation apparatus and method for manufacturing semiconductor device | Daisuke Ito, Tamotsu ODAJIMA, Ryo Shimizu, Tatsuro Matsushima | 2021-03-09 |