Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193895 | Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device | Kentaro OHIRA, Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka | 2021-12-07 |
| 11107655 | Charged particle beam device | Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka, Hisaya Murakoshi | 2021-08-31 |
| 11002687 | Defect inspection method and defect inspection device | Masaki Hasegawa, Katsunori Onuki, Noriyuki Kaneoka, Hisaya Murakoshi | 2021-05-11 |
| 10923315 | Charged particle beam apparatus, and method of adjusting charged particle beam apparatus | Masaki Hasegawa, Noriyuki Kaneoka, Hisaya Murakoshi, Katsunori Onuki | 2021-02-16 |