Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193895 | Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device | Masaki Hasegawa, Tomohiko Ogata, Katsunori Onuki, Noriyuki Kaneoka | 2021-12-07 |