Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043359 | Charged particle beam apparatus and charged particle beam inspection system | Yohei Nakamura, Natsuki Tsuno, Takafumi Miwa, Muneyuki Fukuda, Junichi Tanaka | 2021-06-22 |