Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177133 | Method of filling recess | Satoshi Takagi | 2021-11-16 |
| 11145522 | Method of forming boron-based film, and film forming apparatus | Masahiro Oka, Hirokazu Ueda, Yuuki Yamamoto | 2021-10-12 |