HU

Hirokazu Ueda

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #432,073 of 548,734Top 80%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11145522 Method of forming boron-based film, and film forming apparatus Yoshimasa Watanabe, Masahiro Oka, Yuuki Yamamoto 2021-10-12