Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211265 | Heat treatment apparatus and heat treatment method | Hiroyuki Hayashi, Hsiulin Tsai | 2021-12-28 |
| 11177133 | Method of filling recess | Yoshimasa Watanabe | 2021-11-16 |
| 11134300 | Information processing device | — | 2021-09-28 |