Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118263 | Method for forming a protective coating film for halide plasma resistance | Kevin A. PAPKE, Emily Thomson, Mahmut Sami Kavrik, Andrew C. Kummel | 2021-09-14 |
| 10941303 | Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components | Mats Larsson, Jianqi Wang, Kevin A. PAPKE | 2021-03-09 |
| 10886137 | Selective nitride removal | Prerna Goradia, Geetika Bajaj, Robert Jan Visser, Nitin K. Ingle | 2021-01-05 |