Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Tasnuva Tabassum, Siamak Salimian, Yikai Chen, Kevin A. PAPKE | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Tasnuva Tabassum, Siamak Salimian, Yikai Chen, Kevin A. PAPKE | 2021-06-29 |