Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Young-Hoo Kim, Hyo-San Lee, Tae-Keun Kim +3 more | 2021-10-19 |
| 11135624 | Method and apparatus for substrate cleaning | Mi Young JO, Da-Jeong Kim, Jun Taek KOO | 2021-10-05 |