Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11135624 | Method and apparatus for substrate cleaning | Mi Young JO, Da-Jeong Kim, Ye Rim Yeon | 2021-10-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11135624 | Method and apparatus for substrate cleaning | Mi Young JO, Da-Jeong Kim, Ye Rim Yeon | 2021-10-05 |