Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145529 | EFEM and method of introducing replacement gas thereinto | Hiroshi Igarashi | 2021-10-12 |
| 11133208 | EFEM and method of introducing dry air thereinto | — | 2021-09-28 |
| 11049736 | Circulating EFEM | Hiroshi Igarashi, Mutsuo Sasaki | 2021-06-29 |