Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150573 | Developing cartridge having electrode | Yasumasa Fujii, Tsutomu Suzuki | 2021-10-19 |
| 11145529 | EFEM and method of introducing replacement gas thereinto | Tsutomu Okabe | 2021-10-12 |
| 11049736 | Circulating EFEM | Tsutomu Okabe, Mutsuo Sasaki | 2021-06-29 |