Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11135623 | Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method | Tatsuhiro KOTSUGAI | 2021-10-05 |
| 11049736 | Circulating EFEM | Hiroshi Igarashi, Tsutomu Okabe | 2021-06-29 |