Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211277 | Substrate processing apparatus | Takeshi Ito | 2021-12-28 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Tomoshi Taniyama | 2021-10-26 |
| 11124873 | Substrate processing apparatus | Tomoshi Taniyama, Kenji Shirako | 2021-09-21 |
| D925480 | Electrostatic atomized water particles generating module | Jumpei Oe, Youhei Ishigami, Kana Shimizu, Takafumi Omori, Tetsunori Aono | 2021-07-20 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Tomoshi Taniyama | 2021-03-16 |