Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164723 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-11-02 |
| 10930471 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-02-23 |