Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158506 | Self-aligned, over etched hard mask fabrication method and structure | Frank R. Libsch, Ghavam G. Shahidi, Ko-Tao Lee | 2021-10-26 |
| 11056722 | Tool and method of fabricating a self-aligned solid state thin film battery | Frank R. Libsch, Ghavam G. Shahidi, Ko-Tao Lee | 2021-07-06 |
| 11015258 | Feedback control of dimensions in nanopore and nanofluidic devices | Stefan Harrer, Philip S. Waggoner | 2021-05-25 |
| 10943863 | Techniques to improve reliability in Cu interconnects using Cu intermetallics | Chao-Kun Hu, Christian Lavoie, Thomas M. Shaw | 2021-03-09 |