Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2021-03-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2021-03-16 |