Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto +3 more | 2021-03-16 |