SV

Sergey Voronin

TL Tokyo Electron Limited: 4 patents #38 of 787Top 5%
Overall (2021): #40,516 of 548,734Top 8%
4
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11189462 Ion stratification using bias pulses of short duration 2021-11-30
11133194 Method for selective etching at an interface between materials Christopher Catano, Nicholas Joy, Alok Ranjan, Christopher Talone 2021-09-28
10998170 Method for ion mass separation and ion energy control in process plasmas Yusuke Yoshida, Alok Ranjan, David J. Coumou, Scott E. White 2021-05-04
10903077 Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces Yusuke Yoshida, Christopher Catano, Christopher Talone, Nicholas Joy 2021-01-26